Electron Beam Decomposition of CdCI2
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ABSTRACT
The e-beam stimulated reaction, CdCI2(s) ---> Cd (s) + CI(g), has been studied in casmium chloride thin films between 303 and 483 K using 2-keV electrons. The dose required to make 90-nm-deep holes at 483 K is 3x10-3 C cm -2. Extrapolated dosing levels of 6x10-5 C cm -2 are expected. The use of CdCI2 as a positive-type electron resist in a new scheme is proposed. A working model, useful for considering the e-beam stimulated decomposition energetics and mechanism is briefly discussed.
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APA
(2026). Electron Beam Decomposition of CdCI2. Afribary. Retrieved June 14, 2026, from http://library.afribary.com/works/electron-beam-decomposition-of-cdci2
MLA
"Electron Beam Decomposition of CdCI2." Afribary, 6 Jun. 2026, http://library.afribary.com/works/electron-beam-decomposition-of-cdci2. Accessed June 14, 2026.
Chicago
"Electron Beam Decomposition of CdCI2." Afribary (2026). Accessed June 14, 2026. http://library.afribary.com/works/electron-beam-decomposition-of-cdci2